Modes of rf capacitive discharge in low-pressure sulfur hexafluoride
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Переглянути архів Інформація| Поле | Співвідношення | |
| Title |
Modes of rf capacitive discharge in low-pressure sulfur hexafluoride
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| Creator |
Lisovskiy, V.
Booth, Jean-Paul Jolly, J. Martins, S. Landry, K. Douai, D. Cassagne, V. Yegorenkov, V. |
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| Subject |
plasma physics
gas discharges |
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| Description |
This paper presents the results of an experimental study of rf capacitive discharge in low-pressure SF6. The rf discharge in SF6 is shown to exist not only in weak-current (α-) and strong-current (γ -) modes but also in a dissociative δ-mode. This δ-mode is characterized by a high degree of SF6 dissociation, high plasma density, electron temperature and active discharge current, and it is intermediate between α- and γ -modes. The δ-mode appears due to a sharp increase in the dissociation rate of SF6 molecules via electron impact starting after a certain threshold value of rf voltage. At the same time the threshold ionization energy of SFx (x = 1–5) radicals formed is below the ionization potential of SF6 molecules. The double layer existing in the anode phase of the near-electrode sheath is shown to play an important role in sustaining the α- mode as well as the δ-mode but it is not a cause of the rf discharge transition from α- to δ-mode. |
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| Date |
2010-11-17T18:16:08Z
2010-11-17T18:16:08Z 2007-11 |
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| Type |
Article
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| Identifier |
J. Phys. D: Appl. Phys. 40 (2007) 6989–6999
http://dspace.univer.kharkov.ua/handle/123456789/1698 |
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| Language |
en
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| Relation |
;doi:10.1088/0022-3727/40/22/020
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| Publisher |
JOURNAL OF PHYSICS D: APPLIED PHYSICS
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