Electron drift velocity in silane in strong electric fields determined from rf breakdown curves
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Переглянути архів Інформація| Поле | Співвідношення | |
| Title |
Electron drift velocity in silane in strong electric fields determined from rf breakdown curves
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| Creator |
Lisovskiy, V.
Booth, Jean-Paul Landry, K. Douai, D. Cassagne, V. Yegorenkov, V. |
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| Subject |
plasma physics
gas discharges |
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| Description |
We report measurements of the breakdown curves of an rf capacitive discharge in low pressure silane. The electron drift velocity was determined from the locations of the turning point and of the minimum in the breakdown curves in the range E/p = 145–1292 Vcm−1 Torr−1. We compare our results to values calculated from the published cross-sections in the range E/p = 1–2000 Vcm−1 Torr−1 and data calculated in other papers and find good agreement. |
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| Date |
2010-11-17T19:53:59Z
2010-11-17T19:53:59Z 2007-05 |
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| Type |
Article
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| Identifier |
J. Phys. D: Appl. Phys. 40 (2007) 3408–3410
http://dspace.univer.kharkov.ua/handle/123456789/1702 |
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| Language |
en
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| Relation |
;doi:10.1088/0022-3727/40/11/022
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| Publisher |
JOURNAL OF PHYSICS D: APPLIED PHYSICS
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