Alpha–gamma transition in RF capacitive discharge in low-pressure oxygen
eKhNUIR
Переглянути архів Інформація| Поле | Співвідношення | |
| Title |
Alpha–gamma transition in RF capacitive discharge in low-pressure oxygen
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| Creator |
Lisovskiy, V.
Yegorenkov, V. |
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| Subject |
plasma physics
gas discharges |
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| Description |
We report the recorded current–voltage characteristics of a RF capacitive discharge in oxygen. Low-frequency oscillations of the plasma potential in a kilohertz frequency range are observed to accompany the transition of the discharge from a weak- (a-) to a strong-current (g-) regime in the low-pressure range. The weak-current regime of the RF capacitive discharge is observed within the pressure range limited not only from the medium pressure side but also from the lower-pressure one. Electron temperature and plasma density are registered with a probe technique. |
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| Date |
2010-11-17T21:07:18Z
2010-11-17T21:07:18Z 2004-01 |
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| Type |
Article
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| Identifier |
Vacuum 74 (2004) 19–28
http://dspace.univer.kharkov.ua/handle/123456789/1712 |
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| Language |
en
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| Relation |
;doi:10.1016/j.vacuum.2003.11.003
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| Publisher |
www.elsevier.com/locate/vacuum
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