An Improved SPICE Model for MEMS Based Capacitive Accelerometers
Electronic Archive of Sumy State University
Переглянути архів Інформація| Поле | Співвідношення | |
| Title |
An Improved SPICE Model for MEMS Based Capacitive Accelerometers
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| Creator |
Kavitha, C.
Madhan, M. Ganesh |
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| Subject |
Squeezed film
Capacitive accelerometer Thermal effect Damping Electrical attractive force |
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| Description |
An improved electrical equivalent circuit for a capacitive MEMS accelerometer, incorporating temperature, pressure and squeezed film effects is reported. The circuit model corresponds to a single degree of freedom (SDOF) vibrating system, including dominant micro physical mechanisms. Static, transient and frequency response analysis are carried out at temperature and pressure ranges of 100 K to 400 K and 30 to 3000 Pa respectively. The effect of these parameters on the resonance frequency, peak displacement and settling time of the accelerometer are determined. Simulations are performed using PSpice® circuit simulator.
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| Publisher |
Сумський державний університет
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| Date |
2013-06-19T11:21:14Z
2013-06-19T11:21:14Z 2013 |
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| Type |
Article
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| Identifier |
C. Kavitha, M. Ganesh Madhan, J. Nano- Electron. Phys. 5 No 2, 02011 (2013)
http://essuir.sumdu.edu.ua/handle/123456789/31005 |
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| Language |
en
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