Запис Детальніше

Optical Dispersion In Annealed Thin Films of S-doped a-Si:H Alloys

Electronic Archive of Sumy State University

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Title Optical Dispersion In Annealed Thin Films of S-doped a-Si:H Alloys
 
Creator Purohit, L.P.
Gupta, H.
Pal, Pankaj K.
Kumar, A.
Kumar, R.
Mehra, R.M.
 
Subject a-Si:H thin films
Doping concentrations
Annealing temperatures
Transmittance
Optical constants
 
Description S-doped amorphous hydrogenated silicon (a-Si,S:H) thin films were prepared by conventional PECVD method on corning glass substrates. The prepared thin films were subsequently annealed in vacuum (~ 2 × 10 – 6 Torr) in the temperature range from 100 °C to 500 °C. The annealing effects at room temperature were examined by means of optical transmission spectra of the films in the wavelength range 300-1100 nm. Dispersion in optical constants such as transmittance, bandgap and refractive index were observed. Tailoring in optical constants was observed with respect to doping concentrations as well as the annealing temperatures.
 
Publisher Сумський державний університет
 
Date 2013-06-17T13:05:39Z
2013-06-17T13:05:39Z
2013
 
Type Article
 
Identifier L.P. Purohit, H. Gupta, Pankaj K. Pal, et al., J. Nano- Electron. Phys. 5 No 1, 01020 (2013)
http://essuir.sumdu.edu.ua/handle/123456789/30974
 
Language en