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Characterization of GaN Nanorods Fabricated Using Ni Nanomasking and Reactive Ion Etching: A Top-Down Approach

Electronic Archive of Sumy State University

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Title Characterization of GaN Nanorods Fabricated Using Ni Nanomasking and Reactive Ion Etching: A Top-Down Approach
 
Creator Kumar, Ashutosh
Latzel, Michael
Tessarek, C.
Christiansen, S.
Singh, R.
 
Subject GaN
Nanorod
Nanomasking
Reactive-ion etching
Cathodoluminescence
Band-edge luminescence
Yellow band luminescence
 
Description Large thermal mismatch between GaN surface and sapphire results in compressive stress in Gallium Nitride (GaN) layer which degrades the device performance. Nanostructuring the GaN can reduce this stress leading to reduction in Quantum Confined Stark Effect. Aligned GaN nanorods based nanodevices have potential applications in electronics and optoelectronics. This paper describes the fabrication of GaN nanorods using Ni nanomasking and reactive ion etching. The morphology of GaN nanorods was studied by field emission scanning electron microscopy. The optical properties of GaN nanorods were studied by Cathodoluminescence (CL) spectroscopy. CL results revealed the existence of characteristic band-edge luminescence and yellow band luminescence.
 
Publisher Сумський державний університет
 
Date 2013-06-19T09:43:34Z
2013-06-19T09:43:34Z
2013
 
Type Article
 
Identifier Ashutosh Kumar, Michael Latzel, C. Tessarek, et al., J. Nano- Electron. Phys. 5 No 2, 02001 (2013)
http://essuir.sumdu.edu.ua/handle/123456789/30991
 
Language en