Features of Structure of Magnetron Films Si3N4 and SiC
Electronic Archive of Sumy State University
Переглянути архів Інформація| Поле | Співвідношення | |
| Title |
Features of Structure of Magnetron Films Si3N4 and SiC
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| Creator |
Kuzmenko, A.P.
Chekadanov, A.S. Zakhvalinsky, S.V. Pilyuk, E.A. Dobromyslov, M.B. |
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| Subject |
Small-angle X-ray scattering
Atomic force microscopy Silicon nitride Silicon carbide Thin films |
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| Description |
By small-angle X-ray scattering and atomic force microscopy shows the features of the structure of thin films of Si3N4 and SiC, deposited by magnetron sputtering on glass substrates. When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/33652 |
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| Publisher |
Сумський державний університет
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| Date |
2014-01-18T07:57:15Z
2014-01-18T07:57:15Z 2013 |
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| Type |
Article
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| Identifier |
A.P. Kuzmenko, A.S. Chekadanov, S.V. Zakhvalinsky, et al., J. Nano- Electron. Phys. 5 No 4, 04025 (2013)
http://essuir.sumdu.edu.ua/handle/123456789/33652 |
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| Language |
en
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