Comparative Characteristics of Stress and Structure of TiN and Ti0.5-xAl0.5YxN Coatings Prepared by Filtered Vacuum-Arc PIIID Method
Electronic Archive of Sumy State University
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Title |
Comparative Characteristics of Stress and Structure of TiN and Ti0.5-xAl0.5YxN Coatings Prepared by Filtered Vacuum-Arc PIIID Method
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Creator |
Vasyliev, V.V.
Luchaninov, A.A. Reshetnyak, E.N. Strelnitskij, V.E. |
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Subject |
Nitride coatings
Solid solution Filtered vacuum arc deposition Pulsed substrate bias Residual stress |
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Description |
A comparative study of the structure and stress state of Ti0.5-xAl0.5YxN and TiN coatings deposited under identical conditions from the filtered vacuum-arc plasma under high voltage pulsed bias potential on the substrate was carried out. It was found that for Ti0.5Al0.5N coatings the dependence of the residual stress on the amplitude of the pulsed voltage potential is non-monotonic with a minimum when the amplitude is of 1 kV. As for TiN films, a monotonic decrease in the level of residual stresses takes place when the amplitude of the potential is increased in the range 0-2.5 kV. Non-monotonic dependence for multicomponent coatings Ti-Al-Y-N may occur due to the possibility of phase transition associated with the decay of the supersaturated solid solution (Ti,Al)N stimulated by high energy ion bombardment. |
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Publisher |
Sumy State University
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Date |
2014-05-23T10:17:05Z
2014-05-23T10:17:05Z 2012 |
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Type |
Article
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Identifier |
Comparative Characteristics of Stress and Structure of TiN and Ti0.5-xAl0.5YxN Coatings Prepared by Filtered Vacuum-Arc PIIID Method / V. V. Vasyliev, A. A. Luchaninov, E. N. Reshetniak, V. E. Strelnitskij
// Nanomaterials: Applications & Properties (NAP-2012) : 2-nd International conference, Alushta, the Crimea, September 17-22, 2012 / Edited by: A. Pogrebnjak. - Sumy : Sumy State University, 2012. - V. 1, No2. - 02NFC24-02NFC24
http://essuir.sumdu.edu.ua/handle/123456789/34913 |
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Language |
en
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