Metal Films as Mass Standard Samples in the Nano-Gram Range
Electronic Archive of Sumy State University
Переглянути архів Інформація| Поле | Співвідношення | |
| Title |
Metal Films as Mass Standard Samples in the Nano-Gram Range
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| Creator |
Mikhailov, I.F.
Baturin, A.A. Bugaev, Ye.A. Mikhailov, A.I. Borisova, S.S. |
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| Subject |
Thin Films
Nano-Standards Magnetron Sputtering X-ray Fluorescent Method X-ray Reflectometry |
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| Description |
Attestation of magnetron sputtered films as mass standards is presented. Homogeneous, long-lived metal films were measured by different methods for comparison. The accuracy of the order 1 ng was found to be provided by application of the metal film standards for element analysis by X-ray fluorescent method. Keywords: Thin Films, Nano-Standards, Magnetron Sputtering, X-ray Reflectometry, X-ray Fluorescent |
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| Publisher |
Sumy State University
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| Date |
2014-05-27T11:01:50Z
2014-05-27T11:01:50Z 2013 |
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| Type |
Article
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| Identifier |
Metal Films as Mass Standard Samples in the Nano-Gram Range [Текст] / I.F. Mikhailov, A.A. Baturin, Y.A. Bugaev et al.
// Nanomaterials: Applications & Properties (NAP-2013) : 2-nd International conference, Alushta, the Crimea, September 17-22, 2012 / Edited by: A. Pogrebnjak. - Sumy : Sumy State University, 2013. - V.2, No1. - 01NTF17
http://essuir.sumdu.edu.ua/handle/123456789/35167 |
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| Language |
en
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