Characteristics of DLC Coating Prepared by Pulse Biasing: Analysis in Model of Thermoelastic Peak of Ion
Electronic Archive of Sumy State University
Переглянути архів Інформація| Поле | Співвідношення | |
| Title |
Characteristics of DLC Coating Prepared by Pulse Biasing: Analysis in Model of Thermoelastic Peak of Ion
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| Creator |
Kalinichenko, A.I.
Strel'nitskij, V.E. Vasyliev, V.V. |
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| Subject |
DLC coating
Plasma-based ion deposition Pulse mode deposition Intrinsic stress Phase P Tdiagram of carbon Non-local thermoelastic peak of ion |
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| Description |
A mode of pulse biasing of DLC coating deposition is theoretically investigated. In this mode a deposited ion flow of plasma with energy of E0 (20 200) eV is modified by superimposing of pulse potential ~ 1000 V. It was shown that intrinsic stress in a DLC coating can be decreased in several times without of essential decrease of sp3-bonded carbon concentration compared with DLC made in stationary mode deposition at E0 ion energy. A method of optimization of pulse mode parameters is proposed which is based on analysis of location of thermoelastic peaks of ions on phase P, T-diagram of carbon. |
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| Publisher |
Sumy State University
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| Date |
2014-05-29T08:18:49Z
2014-05-29T08:18:49Z 2012 |
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| Type |
Article
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| Identifier |
Kalinichenko, A. I.
Characteristics of DLC Coating Prepared by Pulse Biasing: Analysis in Model of Thermoelastic Peak of Ion / A. I. Kalinichenko, V. E. Strel'nitskij, V. V. Vasyliev
// Nanomaterials: Applications & Properties (NAP-2012) : 2-nd International conference, Alushta, the Crimea, September 17-22, 2012 / Edited by: A. Pogrebnjak. - Sumy : Sumy State University, 2012. - V. 1, No4. - 04PITSE07
http://essuir.sumdu.edu.ua/handle/123456789/35398 |
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| Language |
en
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