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Influence of Deuterium Ion Implantation on the Structure and Hardness of Nanocrystalline Films

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Title Influence of Deuterium Ion Implantation on the Structure and Hardness of Nanocrystalline Films
 
Creator Kuprin, A.S.
Tolmachova, G.N.
Belous, V.A.
Lomino, N.S.
Ovcharenko, V.D.
Reshetnyak, E.N.
Morozov, O.M.
Zhurba, V.I.
 
Subject Vacuum arc
Nanostructured coatings
Hardness
Implantation
Deuterium
Thermal desorption
 
Description Titanium nitride based coatings are very attractive for protection of materials in extreme conditions.
However, their behavior under different kinds of irradiation is not entirely well understood. In this work,
the influence of ion-implanted deuterium on changes of the structure and mechanical properties TiZrN,
TiAlSiN, TiAlYN films were investigated. Films were deposited by filtered vacuum arc plasma technique.
After deposition all films were irradiated at room temperature with 12 keV D+ ions to dose 1 1018 D/cm2.
Composition, structure and nanohardness of the coatings were determined by X-ray fluorescence method,
X-ray diffraction and nanoindentation. The effusion of the implanted deuterium was studied by thermal
desorption spectroscopy.
It is shown that irradiation by deuterium ions does not make structural changes in multicomponent
films. Deuterium thermal desorption spectrum of various coatings are substantially different. Nanohardness
of all investigated coatings after irradiation and thermal desorption are decreased.
 
Publisher Sumy State University
 
Date 2014-05-29T11:38:39Z
2014-05-29T11:38:39Z
2012
 
Type Article
 
Identifier Influence of Deuterium Ion Implantation on the Structure and Hardness of Nanocrystalline Films / A. S. Kuprin, G. N. Tolmachova, V. A. Belous et al. // Nanomaterials: Applications & Properties (NAP-2012) : 2-nd International conference, Alushta, the Crimea, September 17-22, 2012 / Edited by: A. Pogrebnjak. - Sumy : Sumy State University, 2012. - V. 1, No4. - 04RES07
http://essuir.sumdu.edu.ua/handle/123456789/35453
 
Language en