THERMAL DECOMPOSITION OF INDIUM PHOSPHIDE IN VACUUM AND ATOMIC HYDROGEN ENVIRONMENT
Науковий журнал «Радіоелектроніка, інформатика, управління»
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2313-688X 1607-3274 |
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THERMAL DECOMPOSITION OF INDIUM PHOSPHIDE IN VACUUM AND ATOMIC HYDROGEN ENVIRONMENT |
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Gorbenko, V. I. Gorban, A. N. |
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The thermal decomposition of indium phosphide has been investigated by Auger-electron spectroscopy and mass-spectroscopy. Scanning electron microscopy has been used for study of indium islands growth on surface of the compound semiconductor. The role of atomic hydrogen in processes of decomposition and growth of metallic islands was determined by comparing with these processes under vacuum. |
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National University "Zaporizhzhia Polytechnic" 2013-06-17 00:00:00 |
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application/pdf http://ric.zntu.edu.ua/article/view/14227 |
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Radio Electronics, Computer Science, Control; No. 1 (2012): Radio Electronics, Computer Science, Control |
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ukr |
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