Control of planar magnetron sputtering system operating modes by additional anode magnetic field
Vernadsky National Library of Ukraine
Переглянути архів Інформація| Поле | Співвідношення | |
| Title |
Control of planar magnetron sputtering system operating modes by additional anode magnetic field
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| Creator |
Bizyukov, A.A.
Girka, O.I. Sereda, K.N. Sleptsov, V.V. Chunadra, A.G. |
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| Subject |
Низкотемпературная плазма и плазменные технологии
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| Description |
The control of planar magnetron sputtering system operating modes by additional anode magnetic field was investigated. It was shown that additional anode magnetic field substantially affects to planar magnetron-sputtering system (MSS) balancing and allows adjusting the electron fluxes intensity to the operating surface. It was experimentally shown that the magnetic field intensity increasing stabilizes the low-current discharge. The magnetic field intensity increasing prevents the discharge extinction by the ignition of semi-self-maintained magnetron-type discharge in transverse anode magnetic field.
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| Date |
2011-02-26T22:24:01Z
2011-02-26T22:24:01Z 2010 |
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| Type |
Article
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| Identifier |
Control of planar magnetron sputtering system operating modes by additional anode magnetic field / A.A. Bizyukov, O.I. Girka, K.N. Sereda, V.V. Sleptsov, A.G. Chunadra // Вопросы атомной науки и техники. — 2010. — № 6. — С. 144-146. — Бібліогр.: 3 назв. — англ.
1562-6016 http://dspace.nbuv.gov.ua/handle/123456789/17485 |
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| Language |
en
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| Publisher |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
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