Structure of Fe-Cu coatings prepared by the magnetron sputtering method
Vernadsky National Library of Ukraine
Переглянути архів ІнформаціяПоле | Співвідношення | |
Title |
Structure of Fe-Cu coatings prepared by the magnetron sputtering method
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Creator |
Nowakowska-Langier, K.
Zdunek, K. Chodun, R. Nietubyc, R. Mirowski, R. Witkowski, J. |
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Subject |
Низкотемпературная плазма и плазменные технологии
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Description |
This work presents the results of our research concerning the synthesis of metallic Fe-Cu coatings by use of the magnetron sputtering method. The structure of the coatings synthesized during two modes of pulsed magnetron sputtering was compared . In our experiment the pulsed magnetron power supply generated a series of pulses gated at 1kHz - standard pulsed mode (SPM) and 2 Hz - low frequency pulsed mode (LFPM). The analysis of the microstructure by means of SEM and TEM show that obtained coatings are characterized by nanocrystalline structure. Additionally the optical emission spectra (OES) during the copper and iron sputtering were measured.
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Date |
2011-02-26T22:42:09Z
2011-02-26T22:42:09Z 2010 |
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Type |
Article
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Identifier |
Structure of Fe-Cu coatings prepared by the magnetron sputtering method / K. Nowakowska-Langier, K. Zdunek, R. Chodun, R. Nietubyc, R. Mirowski, J. Witkowski // Вопросы атомной науки и техники. — 2010. — № 6. — С. 159-161. — Бібліогр.: 7 назв. — англ.
1562-6016 http://dspace.nbuv.gov.ua/handle/123456789/17490 |
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Language |
en
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Publisher |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
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