TiN coating etching from a surface of the instrument in beam-plasma system
Vernadsky National Library of Ukraine
Переглянути архів Інформація| Поле | Співвідношення | |
| Title |
TiN coating etching from a surface of the instrument in beam-plasma system
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| Creator |
Bizyukov, A.A.
Kashaba, A.Y. Sereda, K.N. Sleptsov, V.V. Danziger, М. Phiodorov, S. |
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| Subject |
Low temperature plasma and plasma technologies
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| Description |
The results of reactive ion-plasma etching of TiN coatings from a surface of the tool in a beam-plasma system are submitted. The researches were made on the industrial set-up of a type «the Plasma boiler» with a magnetic field of the plug configuration. The electron guns on the basis of magnetron discharge injected from magnetic plug in a magnetic trap volume oncoming electron beams with a current density up to 2 A/cm², energy 350÷550eV. At pressure 1.10⁻³ ÷ 5.10⁻³ Torr in a magnetic trap the beam-plasma discharge was fired from which one crosswise magnetic fields an ion flow on items was extracted. As working gases the mixture Ar and CF₄ were used. The given beam-plasma system allowed selectively to remove from a surface of the tools TiN coating at speed of etching 1÷2 µm/h on the area of 12000cm².
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| Date |
2015-03-18T19:24:36Z
2015-03-18T19:24:36Z 2000 |
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| Type |
Article
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| Identifier |
TiN coating etching from a surface of the instrument in beam-plasma system / A.A. Bizyukov, A.Y. Kashaba, K.N. Sereda, V.V. Sleptsov, М. Danziger, S. Phiodorov // Вопросы атомной науки и техники. — 2000. — № 6. — С. 163-165. — Бібліогр.: 7 назв. — англ.
1562-6016 http://dspace.nbuv.gov.ua/handle/123456789/78562 533.9 |
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| Language |
en
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| Relation |
Вопросы атомной науки и техники
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| Publisher |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
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