Regularities of Al layer structure formation near phase equilibrium in plasma–condensate system
Electronic Archive of Sumy State University
Переглянути архів Інформація| Поле | Співвідношення | |
| Title |
Regularities of Al layer structure formation near phase equilibrium in plasma–condensate system
|
|
| Creator |
Perekrestov, Viacheslav Ivanovych
Перекрестов, Вячеслав Иванович Перекрестов, Вячеслав Іванович Korniushchenko, Hanna Serhiivna Корнющенко, Анна Сергеевна Корнющенко, Ганна Сергіївна Kosminska, Yuliia Oleksandrivna Косминская, Юлия Александровна Космінська, Юлія Олександрівна |
|
| Subject |
plasma-condensate system
isotropic substrate |
|
| Description |
A fundamentally new technological approach to creating porous metal structures on isotropic substrates during condensation of a reverse diffusion flow in a planar dc magnetron is proposed. The physical foundations of the operation of self-organized sputtering systems are analyzed. Conditions of the formation of main varieties of porous structures, such as weakly coupled micro- and nanocrystals, and three-dimensional labyrinth structures, are found using scanning electron microscopy. It is established that the main prerequisites for the formation of pores are the stationarity of the process and proximity to the phase equilibrium in the plasma–condensate system.
|
|
| Publisher |
Physics of the Solid State
|
|
| Date |
2011-03-21T10:22:39Z
2011-03-21T10:22:39Z 2008 |
|
| Type |
Article
|
|
| Identifier |
Perekrestov, V.I. Regularities of Al layer structure formation near phase equilibrium in plasma–condensate system [Текст] / V.I. Perekrestov, H.S. Korniushchenko, Y.O. Kosminska // Physics of the Solid State. — 2008. — vol. 50. — No. 7. — 1357-1364
1063-7834 http://essuir.sumdu.edu.ua/handle/123456789/4100 |
|
| Language |
en
|
|