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Selective processes that proceed during formation of aluminum layers near the phase equilibrium in a plasma–condensate system

Electronic Archive of Sumy State University

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Title Selective processes that proceed during formation of aluminum layers near the phase equilibrium in a plasma–condensate system
 
Creator Перекрестов, Вячеслав Іванович
Перекрестов, Вячеслав Иванович
Perekrestov, Viacheslav Ivanovych
Корнющенко, Ганна Сергіївна
Корнющенко, Анна Сергеевна
Korniushchenko, Hanna Serhiivna
Космінська, Юлія Олександрівна
Косминская, Юлия Александровна
Kosminska, Yuliia Oleksandrivna
 
Subject plasma-condensate system
phase equilibrium
 
Description The mechanisms of pore formation in aluminum condensates produced using a radically new technological approach that is based on self-organized sputtering systems are studied. The main technological parameters of pore formation are found to be determined by the closeness to the phase equilibrium in the plasma–condensate system and by the predominant contribution of structural or field selectivity to atom-by-atom assembling of the condensate.
 
Publisher Technical Physics
 
Date 2011-03-23T11:03:58Z
2011-03-23T11:03:58Z
2008
 
Type Article
 
Identifier Perekrestov, V.I. Selective processes that proceed during formation of aluminum layers near the phase equilibrium in a plasma–condensate system [Текст] / V.I. Perekrestov, H.S. Korniushchenko, Y.A. Kosminska // Technical Physics. — 2008. — vol. 53. — No. 10. — pp. 1364-1370
1063-7842
http://essuir.sumdu.edu.ua/handle/123456789/4369
 
Language en