Selective processes that proceed during formation of aluminum layers near the phase equilibrium in a plasma–condensate system
Electronic Archive of Sumy State University
Переглянути архів ІнформаціяПоле | Співвідношення | |
Title |
Selective processes that proceed during formation of aluminum layers near the phase equilibrium in a plasma–condensate system
|
|
Creator |
Перекрестов, Вячеслав Іванович
Перекрестов, Вячеслав Иванович Perekrestov, Viacheslav Ivanovych Корнющенко, Ганна Сергіївна Корнющенко, Анна Сергеевна Korniushchenko, Hanna Serhiivna Космінська, Юлія Олександрівна Косминская, Юлия Александровна Kosminska, Yuliia Oleksandrivna |
|
Subject |
plasma-condensate system
phase equilibrium |
|
Description |
The mechanisms of pore formation in aluminum condensates produced using a radically new technological approach that is based on self-organized sputtering systems are studied. The main technological parameters of pore formation are found to be determined by the closeness to the phase equilibrium in the plasma–condensate system and by the predominant contribution of structural or field selectivity to atom-by-atom assembling of the condensate.
|
|
Publisher |
Technical Physics
|
|
Date |
2011-03-23T11:03:58Z
2011-03-23T11:03:58Z 2008 |
|
Type |
Article
|
|
Identifier |
Perekrestov, V.I. Selective processes that proceed during formation of aluminum layers near the phase equilibrium in a plasma–condensate system [Текст] / V.I. Perekrestov, H.S. Korniushchenko, Y.A. Kosminska // Technical Physics. — 2008. — vol. 53. — No. 10. — pp. 1364-1370
1063-7842 http://essuir.sumdu.edu.ua/handle/123456789/4369 |
|
Language |
en
|
|