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The kinetic of point defect transformation during the annealing process in electron-irradiated silicon

Vernadsky National Library of Ukraine

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Title The kinetic of point defect transformation during the annealing process in electron-irradiated silicon
 
Creator Gaidar, G.P.
Dolgolenko, A.P.
Litovchenko, P.G.
 
Description The A-centers (VO) annealing and transformation of precursors to form stable
СiОi defects during these processes are described. It was found the necessity to take into
account annihilation of vacancy type defects with the interstitial type mobile defects to
describe the annealing of defects. It was shown that the energies of migration for vacancy
(V) and interstitial carbon atoms Сi that are defined by the degree of their localization in
silicon lattice at the temperature close to 550 K are equal Emv = 1.1 eV and Emc = 1.16 eV, accordingly.
 
Date 2017-05-26T12:47:42Z
2017-05-26T12:47:42Z
2011
 
Type Article
 
Identifier The kinetic of point defect transformation during the annealing process in electron-irradiated silicon / G.P. Gaidar, A.P. Dolgolenko, P.G. Litovchenko // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2011. — Т. 14, № 2. — С. 213-221. — Бібліогр.: 32 назв. — англ.
1560-8034
PACS 61.72.Cc, Ji; 61.80.Fe, 61.82.Fk
http://dspace.nbuv.gov.ua/handle/123456789/117707
 
Language en
 
Relation Semiconductor Physics Quantum Electronics & Optoelectronics
 
Publisher Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України