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Structural changes in Cz-Si single crystals irradiated with high-energy electrons from data of high-resolution X-ray diffractometry

Vernadsky National Library of Ukraine

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Поле Співвідношення
 
Title Structural changes in Cz-Si single crystals irradiated with high-energy electrons from data of high-resolution X-ray diffractometry
 
Creator Fodchuk, І.М.
Dovganyuk, V.V.
Litvinchuk, Т.V.
Kladko, V.P.
Slobodian, М.V.
Gudymenko, O.Yo.
Swiatek, Z.
 
Description Structural changes in silicon single crystals irradiated with high-energy
electrons (Е = 18 MeV) were studied. The peculiarities of diffraction reflection curve
behaviour and changes in the profiles of isodiffusion lines in high-resolution reciprocal
space maps (HR-RSMs) were found as a function of the radiation dose. The generalized
dynamic theory of X-ray Bragg-diffraction in crystals comprising defects of several types
(spherical and disc-shaped clusters as well as dislocation loops) and a damaged nearsurface
layer was used for explanation.
 
Date 2017-05-29T13:35:02Z
2017-05-29T13:35:02Z
2010
 
Type Article
 
Identifier Structural changes in Cz-Si single crystals irradiated with high-energy electrons from data of high-resolution X-ray diffractometry/ І.М. Fodchuk, V.V. Dovganyuk, Т.V. Litvinchuk , V.P. Kladko, М.V. Slobodian, O.Yo. Gudymenko, Z. Swiatek // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2010. — Т. 13, № 2. — С. 209-213. — Бібліогр.: 22 назв. — англ.
1560-8034
PACS 61.10.Kw, Nz, 61.72.Dd, Ff, 68.55.Ln
http://dspace.nbuv.gov.ua/handle/123456789/118237
 
Language en
 
Relation Semiconductor Physics Quantum Electronics & Optoelectronics
 
Publisher Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України