Modification of properties of the glass-Si₃N₄-Si-SiO₂ structure at laser treatment
Vernadsky National Library of Ukraine
Переглянути архів ІнформаціяПоле | Співвідношення | |
Title |
Modification of properties of the glass-Si₃N₄-Si-SiO₂ structure at laser treatment
|
|
Creator |
Konakova, R.V.
Kladko, V.P. Lytvyn, O.S. Okhrimenko, O.B. Konoplev, B.G. Svetlichnyi, A.M. Lissotschenko, V.N. |
|
Description |
We studied the effect of laser treatment on the glass-Si₃N₄-Si-SiO₂ structures. It is shown that laser treatment causes appearance of an additional band in their transmission spectra as well as smearing of grain structure at their surface. |
|
Date |
2017-05-31T19:49:39Z
2017-05-31T19:49:39Z 2009 |
|
Type |
Article
|
|
Identifier |
Modification of properties of the glass-Si₃N₄-Si-SiO₂ structure at laser treatment / R.V. Konakova, V.P. Kladko, O.S. Lytvyn, O.B. Okhrimenko, B.G. Konoplev, A.M. Svetlichnyi, V.N. Lissotschenko // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2009. — Т. 12, № 3. — С. 284-286. — Бібліогр.: 7 назв. — англ.
1560-8034 PACS 71.20.Nr, 78.40.Fy http://dspace.nbuv.gov.ua/handle/123456789/118876 |
|
Language |
en
|
|
Relation |
Semiconductor Physics Quantum Electronics & Optoelectronics
|
|
Publisher |
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
|
|