Запис Детальніше

Investigation of ArF* excimer laser VUV radiation action on sapphire

Vernadsky National Library of Ukraine

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Поле Співвідношення
 
Title Investigation of ArF* excimer laser VUV radiation action on sapphire
 
Creator Baschenko, S.M.
Gochelashvili, K.S.
Zakirov, R.M.
Klimov, V.I.
Mikhkelsoo, V.T.
Prokhorov, O.M.
 
Description Aluminium components of products escaped from the surface of a sapphire target being illuminated by VUV emission of an ArF* laser are investigated using the method of laser-induced fluorescence combined with the transient time technique. Relative concentrations of aluminium atoms and ions as well as their distribution on velocities in the flow are measured. Determined is also the temperature and velocity of aluminium atoms. It is ascertained that within the range of used energy densities of 0.45 to 1.0 J/cm² extraction of materials can be made in three regimes, namely: the ablation, the plasma and mixed ones, intertransitions between them being of a cyclic character.
 
Date 2017-06-06T13:05:18Z
2017-06-06T13:05:18Z
2001
 
Type Article
 
Identifier Investigation of ArF* excimer laser VUV radiation action on sapphire / S.M. Baschenko, K.S. Gochelashvili, R.M. Zakirov, V.I. Klimov, V.T. Mikhkelsoo, O.M. Prokhorov // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2001. — Т. 4, № 4. — С. 290-297. — Бібліогр.: 14 назв. — англ.
1560-8034
PACS: 32.50; 42.55.L; 79.20.D
http://dspace.nbuv.gov.ua/handle/123456789/119330
 
Language en
 
Relation Semiconductor Physics Quantum Electronics & Optoelectronics
 
Publisher Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України