Polishing of AlN/sapphire substrates obtained by thermochemical nitridation of sapphire
Vernadsky National Library of Ukraine
Переглянути архів Інформація| Поле | Співвідношення | |
| Title |
Polishing of AlN/sapphire substrates obtained by thermochemical nitridation of sapphire
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| Creator |
Vovk, E.A.
Budnikov, A.T. Nizhankovskyi, S.V. Kryvonogov, S.I. Krukhmalev, A.A. Dobrotvorskaya, M.V. |
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| Subject |
Technology
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| Description |
Physicochemical conditions and polishing suspension composition were established for polishing of AlN/sapphire templates obtained by thermochemical nitridation of sapphire. The use of the polishing suspension based on aerosil and KOH with pH 10.3 allowed to prepare the surface with a roughness Ra up to 1 nm. The morphology and element composition of AlN/sapphire surface at layer-by-layer removal of the nitridated layer were studied by the methods of atomic force microscopy and X-ray photoelectronic spectroscopy.
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| Date |
2017-06-11T05:45:05Z
2017-06-11T05:45:05Z 2013 |
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| Type |
Article
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| Identifier |
Polishing of AlN/sapphire substrates obtained by thermochemical nitridation of sapphire / E.A. Vovk, A.T. Budnikov, S.V. Nizhankovskyi, S.I. Kryvonogov, A.A. Krukhmalev, M.V.
Dobrotvorskaya // Functional Materials. — 2013. — Т. 20, № 2. — С. 253-258. — Бібліогр.: 10 назв. — англ.
1027-5495 DOI: dx.doi.org/10.15407/fm20.02.253 http://dspace.nbuv.gov.ua/handle/123456789/120073 |
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| Language |
en
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| Relation |
Functional Materials
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| Publisher |
НТК «Інститут монокристалів» НАН України
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