Thermoelastic stresses and defect production in semiconductor-insulator structures at isothermic heating
Vernadsky National Library of Ukraine
Переглянути архів Інформація| Поле | Співвідношення | |
| Title |
Thermoelastic stresses and defect production in semiconductor-insulator structures at isothermic heating
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| Creator |
Agueev, O.A.
Svetlichnyi, A.M. |
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| Description |
For semiconductor structure substrates with film coating disturbances we investigated thermoelastic stresses and their effect on defect production at isothermic heating. A developed mathematical model enables one to optimize the formation and annealing conditions for structures with film coating disturbances during annealing when manufacturing integrated microcircuits.
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| Date |
2017-06-13T16:16:10Z
2017-06-13T16:16:10Z 2000 |
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| Type |
Article
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| Identifier |
Thermoelastic stresses and defect production in semiconductor-insulator structures at isothermic heating / O.A. Agueev, A.M. Svetlichnyi // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2000. — Т. 3, № 3. — С. 338-342. — Бібліогр.: 12 назв. — англ.
1560-8034 PACS: 61.72.H, 73.40.Q http://dspace.nbuv.gov.ua/handle/123456789/121167 |
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| Language |
en
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| Relation |
Semiconductor Physics Quantum Electronics & Optoelectronics
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| Publisher |
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
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