Electron transport through nanocomposite SiO₂(Si) films containing Si nanocrystals
Vernadsky National Library of Ukraine
Переглянути архів ІнформаціяПоле | Співвідношення | |
Title |
Electron transport through nanocomposite SiO₂(Si) films containing Si nanocrystals
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Creator |
Bratus, O.L.
Evtukh, A.A. Steblova, O.V. Prokopchuk, V.M. |
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Description |
The current transport through insulating SiO₂ films with silicon nanocrystals in Si/SiO₂(Si)/Al structures has been investigated in the wide range of temperatures (82…350 K). The nanocomposite SiO₂(Si) films containing the silicon nanoclusters embedded into insulating SiO₂ matrix have been obtained by ion-plasma sputtering of silicon target and subsequent high-temperature annealing. Based on the detailed analysis of current-voltage characteristics, calculation of some electrical parameters has been performed and the mechanism of electron conductivity of nanocomposite SiO₂(Si) films has been ascertained. The electrical conductivity of the films is based on the mechanism of hopping conductivity with variable-range hopping through the traps near the Fermi level.
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Date |
2017-06-14T15:11:13Z
2017-06-14T15:11:13Z 2016 |
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Type |
Article
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Identifier |
Electron transport through nanocomposite SiO₂(Si) films containing Si nanocrystals / O.L. Bratus, A.A. Evtukh, O.V. Steblova, V.M. Prokopchuk // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2016. — Т. 19, № 1. — С. 9-13. — Бібліогр.: 11 назв. — англ.
1560-8034 DOI: 10.15407/spqeo19.01.009 PACS 72.20.Ее, 73.63.Bd http://dspace.nbuv.gov.ua/handle/123456789/121517 |
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Language |
en
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Relation |
Semiconductor Physics Quantum Electronics & Optoelectronics
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Publisher |
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
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