Structure and stress state of ion-plasma hafnium condensates
Vernadsky National Library of Ukraine
Переглянути архів Інформація| Поле | Співвідношення | |
| Title |
Structure and stress state of ion-plasma hafnium condensates
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| Creator |
Vus, A.S.
Malykhin, S.V. Pugachev, A.T. Reshetnyak, E.N. Azhazha, R.V. Kovtun, K.V. |
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| Description |
The 0.05-0.5 μm trick films have been obtained from GFE-1 grade hafnium target by magnetron sputtering using argon ions. Purity of the obtained films was controlled by X-ray fluorescence spectroscopy. The structure of films was explored by X-ray diffractometry. The compression residual stresses in the α-Hf films and the value of crystal lattice periods have been determined by X-ray strain measurement.
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| Date |
2018-06-16T13:04:54Z
2018-06-16T13:04:54Z 2007 |
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| Type |
Article
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| Identifier |
Structure and stress state of ion-plasma hafnium condensates / A.S. Vus, S.V. Malykhin, A.T. Pugachev, E.N. Reshetnyak, R.V. Azhazha, K.V. Kovtun // Functional Materials. — 2007. — Т. 14, № 2. — С. 204-208. — Бібліогр.: 11 назв. — англ.
1027-5495 http://dspace.nbuv.gov.ua/handle/123456789/136491 |
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| Language |
en
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| Relation |
Functional Materials
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| Publisher |
НТК «Інститут монокристалів» НАН України
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