Synthesis of charged silica films of porous structure
Vernadsky National Library of Ukraine
Переглянути архів Інформація| Поле | Співвідношення | |
| Title |
Synthesis of charged silica films of porous structure
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| Creator |
Zharkikh, Yu.S.
Lysochenko, S.V. Pylypenko, O.A. Tretyak, O.V. |
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| Subject |
Technology
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| Description |
A new technique has been proposed to obtain thin charged dielectric silica films with porous structure on a Si surface. The film composition and charge state of the dielectric/semiconductor system obtained have been studied. Thickness and porosity degree of the synthesized films have been estimated. The films have been shown to be similar in structure to silica aerogel. The films using in the semiconductor microelectronics, in particular, for sensors and solar cells is proposed.
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| Date |
2018-06-17T09:15:13Z
2018-06-17T09:15:13Z 2008 |
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| Type |
Article
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| Identifier |
Synthesis of charged silica films of porous structure / Yu.S. Zharkikh, S.V. Lysochenko, O.A. Pylypenko, O.V. Tretyak // Functional Materials. — 2008. — Т. 15, № 1. — С. 127-130. — Бібліогр.: 10 назв. — англ.
1027-5495 http://dspace.nbuv.gov.ua/handle/123456789/137233 |
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| Language |
en
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| Relation |
Functional Materials
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| Publisher |
НТК «Інститут монокристалів» НАН України
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