Technological Process Identification Method for Accelerometers MEMS
Електронного архіву Харківського національного університету радіоелектроніки (Open Access Repository of KHNURE)
Переглянути архів Інформація| Поле | Співвідношення | |
| Title |
Technological Process Identification Method for Accelerometers MEMS
|
|
| Creator |
Nevlyudov, I.
Yevsieiev, V. Miliutina, S. Bortnikova, V. |
|
| Subject |
CAM
Technological Process Accelerometers MEMS |
|
| Description |
Proposed accelerometers production technological process identification method allows to simplify a technological process choice for accelerometers MEMS design.
|
|
| Date |
2017-01-15T20:52:55Z
2017-01-15T20:52:55Z 2016 |
|
| Type |
Thesis
|
|
| Identifier |
978-617-607977-4
http://openarchive.nure.ua/handle/document/3510 |
|
| Language |
en_US
|
|
| Publisher |
CADMD 2016. XXIV International Ukrainian-Polish Conference
|
|