Application of carbon as a barrier layer in Sc/Si multilayer X-ray mirrors
Vernadsky National Library of Ukraine
Переглянути архів Інформація| Поле | Співвідношення | |
| Title |
Application of carbon as a barrier layer in Sc/Si multilayer X-ray mirrors
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| Creator |
Pershyn, Yu.P.
Devizenko, I.Yu. Chumak, V.S. Devizenko, A.Yu. Kondratenko, V.V. |
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| Subject |
Characterization and properties
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| Description |
X-ray reflectometry in the hard X-ray region (λ = 0.154 nm) was used to investigate the barrier properties of carbon layers 0.2-1.3 nm thick in Sc/Si multilayer X-ray mirrors (MXMs) deposited by DC magnetron sputtering. Precise measurement of the MXM period makes it possible to record volumetric changes in the Sc/C/Si MXM with an accuracy better than 0.01 nm, thus the interaction of the carbon layers with the material of the matrix layers was revealed. The formation of carbide (Si-on-Sc interface) and carbide-silicide (Sc-on-Si nterface) layers was found. The reflectivity of the Sc/C/Si mirrors at the wavelength of ~ 46.9 nm was estimated.
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| Date |
2019-06-19T16:32:48Z
2019-06-19T16:32:48Z 2018 |
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| Type |
Article
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| Identifier |
Application of carbon as a barrier layer in Sc/Si multilayer X-ray mirrors / Yu.P. Pershyn, I.Yu. Devizenko, V.S. Chumak, A.Yu. Devizenko, V.V. Kondratenko // Functional Materials. — 2018. — Т. 25, № 3. — С. 505-515. — Бібліогр.: 18 назв. — англ.
1027-5495 DOI:https://doi.org/10.15407/fm25.03.505 http://dspace.nbuv.gov.ua/handle/123456789/157155 |
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| Language |
en
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| Relation |
Functional Materials
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| Publisher |
НТК «Інститут монокристалів» НАН України
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