Structure and mechanical stresses in TaSi₂/Si multilayer
Vernadsky National Library of Ukraine
Переглянути архів Інформація| Поле | Співвідношення | |
| Title |
Structure and mechanical stresses in TaSi₂/Si multilayer
|
|
| Creator |
Devizenko, A.Yu.
Kopylets, I.A. Kondratenko, V.V. Pershyn, Y.P. Devizenko, I.Y. Zubarev, E.N. Savitskiy, B.A. |
|
| Subject |
Characterization and properties
|
|
| Description |
The structure, construction and mechanical stresses of the TaSi₂/Si multilayer manufactured by magnetron sputtering on the heated substrates were studied in the initial state and after thermal annealing. Deposition of multilayers is accompanied by formation of compressive mechanical stress. Reduction of mechanical stresses in the multilayers by increasing of the substrate temperature and after thermal annealing was observed. The thickness of the multilayers and the annealing temperature at which ones separated from the substrate were shown. Thermal annealing is accompanied by changes of the multilayer construction and structure of layers. The deposition of depth graded multilayers with layer thickness distribution according to the Fresnel zone plate law has been performed.
|
|
| Date |
2019-06-20T03:27:17Z
2019-06-20T03:27:17Z 2018 |
|
| Type |
Article
|
|
| Identifier |
Structure and mechanical stresses in TaSi₂/Si multilayer / A.Yu. Devizenko, I.A. Kopylets, V.V. Kondratenko, Y.P. Pershyn, I.Y. Devizenko, E.N. Zubarev, B.A. Savitskiy // Functional Materials. — 2018. — Т. 25, № 4. — С. 729-735. — Бібліогр.: 12 назв. — англ.
1027-5495 DOI:https://doi.org/10.15407/fm25.04.729 http://dspace.nbuv.gov.ua/handle/123456789/157428 |
|
| Language |
en
|
|
| Relation |
Functional Materials
|
|
| Publisher |
НТК «Інститут монокристалів» НАН України
|
|