Modes and the alpha-gamma transition in rf capacitive discharges in N2O at different rf frequencies
eKhNUIR
Переглянути архів Інформація| Поле | Співвідношення | |
| Title |
Modes and the alpha-gamma transition in rf capacitive discharges in N2O at different rf frequencies
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| Creator |
Lisovskiy, V.
Booth, Jean-Paul Landry, K. Douai, D. Cassagne, V. Yegorenkov, V. |
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| Subject |
plasma physics
gas discharges |
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| Description |
This paper reports current-voltage characteristics and pressure-voltage transition curves from the weak-current a-mode to the strong-current g-mode for rf capacitive discharges in N2O at frequencies of 2 MHz, 13.56 MHz, and 27.12 MHz. At 2 MHz the rf discharge is mostly resistive whereas at 13.56 MHz and 27.12 MHz it is mostly capacitive. The weak-current a-mode was found to exist only above a certain minimum gas pressure for all frequencies studied [N. Yatsenko Sov. Phys. Tech. Phys. 26, 678 (19810] previously proposed that the a−g transition corresponds to breakdown of the sheaths. However, we show that this is the case only for sufficiently high gas pressures. At lower pressure there is a smooth transition from the weak-current a-mode to a strong-current g-mode, in which the sheaths produce fast electrons but the sheath has not undergone breakdown. |
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| Date |
2010-11-17T20:25:03Z
2010-11-17T20:25:03Z 2006-10 |
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| Type |
Article
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| Identifier |
PHYSICS OF PLASMAS 13, 103505 (2006)
http://dspace.univer.kharkov.ua/handle/123456789/1704 |
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| Language |
en
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| Relation |
;DOI: 10.1063/1.2364135
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| Publisher |
PHYSICS OF PLASMAS
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